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It is Planar Stage of TETRA company.
The stage can process with arc revision.
The size of the stage is from 100 millimeters to 150 millimeters.
A maximum speed is 500 millimeters per seconds.
The characteristic of the stage is a coil in the tetra position below.
A permanent magnet is installed to a floating slider.
The stage move in air bearing and is controled in a magnetic field.
It process a minute processing with a laser, like for a gear of the clock and a stent to put in heart.
I am going to develop the system of a controller and the laser using the high speed element, in the next year.
The stage works with the balance of the magnetic field.
It read positional information in optical sensor in the bottom while doing arc revision
The stage is suitable for the trajectory line.